The development of a real-time image guided micro electroplating system

Ting Chao Chen, Yean Ren Hwang, Jing Chie Lin, Yong Jie Ciou

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

A real-time image guided continuous micro-electroplating system equipped with four elements, such as a Charge-coupled Device camera (CCD camera), a magnifier lens, a micro-stepper motor controller, and micro-electroplating device, is proposed in this paper. To maintain the electroplating quality, the system continuously controls the micro-stepper motor and keeps constant gap distance between the micro-anode and copper specimen. In the process of electroplating, chemical reactions would generate oxygen bubbles automatically thus to deteriorate captured images. To solve the bubble issue, a real-time image of the distance between the copper column tip and the anode captured by a CCD camera is used to determine and adjust the cathode position. Besides, four statistic judging criterions are used and compared to determine the bubble-free images. Based on the processing time and accurate rate, the algorithm using entropy index is proposed in this paper for real-time control. From the experiment results, a real-time image guided micro electroplating system does produce better structure, better uniformity and better finishing surface of the specimens compared to those by previous intermittent electroplating setup.

Original languageEnglish
Pages (from-to)1810-1820
Number of pages11
JournalInternational Journal of Electrochemical Science
Volume5
Issue number12
StatePublished - Dec 2010

Keywords

  • CCD camera
  • Image processing
  • Micro-electroplating
  • Motion control

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