The characteristics of EPI-SI thin film in electron cyclotron resonance plasma examined by an integrated plasma diagnostic sub-system

S. K. Jou, L. C. Hu, C. R. Yang, Y. W. Lin, C. J. Wang, T. C. Wei, C. C. Lee, J. Y. Chang, I. C. Chen, Tomi T. Li

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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