Synthesis of cobalt metal nanowire arrays and the interfacial reactions of cobalt nanowires on (001)Si

S. L. Cheng, Y. P. Wei, C. H. Chung

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this study, we report the successful synthesis of large-scale, well-aligned pure cobalt metal nanowire arrays by using the electrodeposition in conjunction with anodic aluminum oxide (AAO) templates technique, and the investigation of the interfacial reactions between the produced Co metal nanowires and (001)Si substrate after different heat treatments. The morphologies, crystal structures, and compositions of the as-synthesized Co nanowires and the Co silicide nanostructures obtained after annealing at various temperatures were systematically investigated by SEM, TEM, and electron diffraction analyses.

Original languageEnglish
Title of host publication4th IEEE International NanoElectronics Conference, INEC 2011
DOIs
StatePublished - 2011
Event4th IEEE International Nanoelectronics Conference, INEC 2011 - Tao-Yuan, Taiwan
Duration: 21 Jun 201124 Jun 2011

Publication series

NameProceedings - International NanoElectronics Conference, INEC
ISSN (Print)2159-3523

Conference

Conference4th IEEE International Nanoelectronics Conference, INEC 2011
Country/TerritoryTaiwan
CityTao-Yuan
Period21/06/1124/06/11

Keywords

  • Co Nanowires
  • Co silicides
  • SEM and TEM
  • anodic alumina oxide
  • electrodeposition
  • interfacial reaction

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