@inproceedings{43325f32e9e146aaad7b5c3d81020f5a,
title = "Suppression fresnel reflection of nano-patterned silicon substrate formed by monolayer nanospheres",
abstract = "An anti-reflection nano-patterned silicon substrate (NPSiS) has been demonstrated by using self-assembly the single layer nano-sphere and ICP etching process. The average reflectivity of the NPSiS could be reduced to 0.79%.",
author = "Lin, {Chang Rong} and Chan, {Chia Hua} and Tseng, {Shao Ze} and Chen, {Chii Chang} and Chen, {Sheng Hui}",
year = "2013",
language = "???core.languages.en_GB???",
isbn = "9781557529701",
series = "Optics InfoBase Conference Papers",
booktitle = "Optical Interference Coatings, OIC 2013",
note = "Optical Interference Coatings, OIC 2013 ; Conference date: 16-06-2013 Through 21-06-2013",
}