Subnanometer displacement measurement using common-path grating interferometry

Chyan Chyi Wu; Cheng Chih Hsu; Ju Yi Lee; Chao Jung Chen

Subnanometer displacement measurement using common-path grating interferometry

Chyan Chyi Wu, Cheng Chih Hsu, Ju Yi Lee, Chao Jung Chen

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE
State	Published - 2008
Event	23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE - Portland, OR, United States Duration: 19 Oct 2008 → 24 Oct 2008

Publication series

Name	Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE

Conference

Conference	23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE
Country/Territory	United States
City	Portland, OR
Period	19/10/08 → 24/10/08

Cite this

Wu, C. C., Hsu, C. C., Lee, J. Y., & Chen, C. J. (2008). Subnanometer displacement measurement using common-path grating interferometry. In Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE (Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE).

Wu, Chyan Chyi ; Hsu, Cheng Chih ; Lee, Ju Yi et al. / Subnanometer displacement measurement using common-path grating interferometry. Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE. 2008. (Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE).

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title = "Subnanometer displacement measurement using common-path grating interferometry",

author = "Wu, {Chyan Chyi} and Hsu, {Cheng Chih} and Lee, {Ju Yi} and Chen, {Chao Jung}",

year = "2008",

language = "???core.languages.en_GB???",

isbn = "9781887706483",

series = "Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE",

booktitle = "Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE",

note = "23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE ; Conference date: 19-10-2008 Through 24-10-2008",

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Wu, CC, Hsu, CC, Lee, JY & Chen, CJ 2008, Subnanometer displacement measurement using common-path grating interferometry. in Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE. Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE, 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE, Portland, OR, United States, 19/10/08.

Subnanometer displacement measurement using common-path grating interferometry. / Wu, Chyan Chyi; Hsu, Cheng Chih; Lee, Ju Yi et al.
Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE. 2008. (Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Hsu, Cheng Chih

AU - Lee, Ju Yi

AU - Chen, Chao Jung

PY - 2008

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M3 - 會議論文篇章

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SN - 9781887706483

T3 - Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE

BT - Proceedings of the 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE

T2 - 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE

Y2 - 19 October 2008 through 24 October 2008

ER -