Mathematics
Planar Waveguides
100%
Gratings
81%
Wavelength
66%
Presentation
48%
Reflector
47%
Coupler
16%
Incidence
16%
Waveguide
13%
Electron Beam Lithography
11%
Photoresist
10%
SiO2
9%
Near Infrared
9%
Finite-difference Time-domain Method
9%
Evaporation
8%
Silicon
8%
Fabrication
8%
Substrate
6%
Angle
4%
Simulation
3%
Range of data
3%
Engineering & Materials Science
Planar waveguides
90%
Distributed Bragg reflectors
84%
Wavelength
51%
Waveguides
29%
Ion beam assisted deposition
25%
Electron beam lithography
22%
Photoresists
18%
Finite difference time domain method
17%
Film thickness
15%
Evaporation
14%
Deposits
14%
Infrared radiation
12%
Silicon
11%
Fabrication
10%
Substrates
10%
Physics & Astronomy
gratings
41%
waveguides
38%
wavelengths
27%
Bragg reflectors
19%
reflectors
16%
incidence
14%
couplers
10%
photoresists
6%
finite difference time domain method
5%
deposits
5%
lithography
4%
film thickness
4%
ion beams
4%
evaporation
4%
electron beams
4%
fabrication
3%
silicon
3%
simulation
2%
Chemical Compounds
Liquid Film
28%
Wavelength
27%
Cladding
25%
Electron Beam
20%
Wave
18%
Evaporation
17%
Simulation
12%
Time
6%