Study on Reduction of Background Fringes for Defect Detection of Specular Surface

An Chi Wei; Yi Cheng Chang; Jyh Rou Sze

doi:10.1109/APSIPAASC58517.2023.10317452

Study on Reduction of Background Fringes for Defect Detection of Specular Surface

An Chi Wei, Yi Cheng Chang, Jyh Rou Sze

Graduate Institute of Energy Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

For the defect detection of specular surfaces, the image of the light source and other images of surrounding objects tend to be recorded, increasing the complexity of recognition. The method of combined dark-and-bright field illumination has been shown to improve the image quality of the defects on specular surfaces. However, there is still an issue of background fringes. In this study, we design a compensating pattern for diminishing the background fringes. The experimental results show that the proposed method can effectively dilute these fringes and increase the detection efficiency by fewer capture images.

Original language	English
Title of host publication	2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	2163-2167
Number of pages	5
ISBN (Electronic)	9798350300673
DOIs	https://doi.org/10.1109/APSIPAASC58517.2023.10317452
State	Published - 2023
Event	2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023 - Taipei, Taiwan Duration: 31 Oct 2023 → 3 Nov 2023

Publication series

Name	2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023

Conference

Conference	2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023
Country/Territory	Taiwan
City	Taipei
Period	31/10/23 → 3/11/23

Access to Document

10.1109/APSIPAASC58517.2023.10317452

應用於半導體製程氣體特性監控之智慧型波前感測技術開發
Wei, A.-C. (PI)
1/08/23 → 31/07/24
Project: Research

Cite this

Wei, A. C., Chang, Y. C., & Sze, J. R. (2023). Study on Reduction of Background Fringes for Defect Detection of Specular Surface. In 2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023 (pp. 2163-2167). (2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/APSIPAASC58517.2023.10317452

Wei, An Chi ; Chang, Yi Cheng ; Sze, Jyh Rou. / Study on Reduction of Background Fringes for Defect Detection of Specular Surface. 2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023. Institute of Electrical and Electronics Engineers Inc., 2023. pp. 2163-2167 (2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023).

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title = "Study on Reduction of Background Fringes for Defect Detection of Specular Surface",

abstract = "For the defect detection of specular surfaces, the image of the light source and other images of surrounding objects tend to be recorded, increasing the complexity of recognition. The method of combined dark-and-bright field illumination has been shown to improve the image quality of the defects on specular surfaces. However, there is still an issue of background fringes. In this study, we design a compensating pattern for diminishing the background fringes. The experimental results show that the proposed method can effectively dilute these fringes and increase the detection efficiency by fewer capture images.",

author = "Wei, {An Chi} and Chang, {Yi Cheng} and Sze, {Jyh Rou}",

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Wei, AC, Chang, YC & Sze, JR 2023, Study on Reduction of Background Fringes for Defect Detection of Specular Surface. in 2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023. 2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023, Institute of Electrical and Electronics Engineers Inc., pp. 2163-2167, 2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023, Taipei, Taiwan, 31/10/23. https://doi.org/10.1109/APSIPAASC58517.2023.10317452

Study on Reduction of Background Fringes for Defect Detection of Specular Surface. / Wei, An Chi; Chang, Yi Cheng; Sze, Jyh Rou.
2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023. Institute of Electrical and Electronics Engineers Inc., 2023. p. 2163-2167 (2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Chang, Yi Cheng

AU - Sze, Jyh Rou

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N2 - For the defect detection of specular surfaces, the image of the light source and other images of surrounding objects tend to be recorded, increasing the complexity of recognition. The method of combined dark-and-bright field illumination has been shown to improve the image quality of the defects on specular surfaces. However, there is still an issue of background fringes. In this study, we design a compensating pattern for diminishing the background fringes. The experimental results show that the proposed method can effectively dilute these fringes and increase the detection efficiency by fewer capture images.

AB - For the defect detection of specular surfaces, the image of the light source and other images of surrounding objects tend to be recorded, increasing the complexity of recognition. The method of combined dark-and-bright field illumination has been shown to improve the image quality of the defects on specular surfaces. However, there is still an issue of background fringes. In this study, we design a compensating pattern for diminishing the background fringes. The experimental results show that the proposed method can effectively dilute these fringes and increase the detection efficiency by fewer capture images.

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PB - Institute of Electrical and Electronics Engineers Inc.

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Y2 - 31 October 2023 through 3 November 2023

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Wei AC, Chang YC, Sze JR. Study on Reduction of Background Fringes for Defect Detection of Specular Surface. In 2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023. Institute of Electrical and Electronics Engineers Inc. 2023. p. 2163-2167. (2023 Asia Pacific Signal and Information Processing Association Annual Summit and Conference, APSIPA ASC 2023). doi: 10.1109/APSIPAASC58517.2023.10317452

Study on Reduction of Background Fringes for Defect Detection of Specular Surface

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應用於半導體製程氣體特性監控之智慧型波前感測技術開發

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