Study on IoT and Big Data Analysis of Furnace Process Exhaust Gas Leakage

Yu Wen Zhou, Kuo Chi Chang, Jeng Shyang Pan, Kai Chun Chu, Der Juinn Horng, Yuh Chung Lin, Huang Jing

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

Modern FABs use a large number of high-energy processes such as plasma, CVD, and ion implantation; the furnace is one of the important tools of semiconductor manufacturing. The FAB installed FTIR system due to the 12” furnace tools based on the aforementioned production management requirements. This study used open-type FTIR and integrated IoT mechanism to connect to the cloud, which is suitable for a variety of gaseous pollutants. This study set up two measuring points of furnace process tools in the 12” factory of Hsinchu Science Park in Taiwan. This study obtained FTIR measurements, and according to the OHSA regulations, this study is set in the cloud database for big data analysis and decision-making, when the upper limits of TEOS, C2H4, and CO are 0.6 ppm, 2.0 ppm, and 1.7 ppm and the lower limits of TEOS, C2H4, and CO are 0.4 ppm, 1.5 ppm, and 1 ppm. The application architecture of this study can be extended to other semiconductor processes, so that IoT integration and big data operations can be performed for all processes; this is an important step in promoting FAB intelligent production and an important contribution of this study.

Original languageEnglish
Title of host publicationAdvances in Intelligent Information Hiding and Multimedia Signal Processing - Proceedings of the 15th International Conference on IIH-MSP in conjunction with the 12th International Conference on FITAT 2019
EditorsJeng-Shyang Pan, Jianpo Li, Pei-Wei Tsai, Lakhmi C. Jain, Lakhmi C. Jain, Lakhmi C. Jain, Lakhmi C. Jain
PublisherSpringer Science and Business Media Deutschland GmbH
Pages41-49
Number of pages9
ISBN (Print)9789811397134
DOIs
StatePublished - 2020
Event15th International Conference on Intelligent Information Hiding and Multimedia Signal Processing, IIH-MSP 2019, held in conjunction with the 12th International Conference on Frontiers of Information Technology, Applications and Tools, FITAT 2019 - Jilin, China
Duration: 18 Jul 201920 Jul 2019

Publication series

NameSmart Innovation, Systems and Technologies
Volume156
ISSN (Print)2190-3018
ISSN (Electronic)2190-3026

Conference

Conference15th International Conference on Intelligent Information Hiding and Multimedia Signal Processing, IIH-MSP 2019, held in conjunction with the 12th International Conference on Frontiers of Information Technology, Applications and Tools, FITAT 2019
Country/TerritoryChina
CityJilin
Period18/07/1920/07/19

Keywords

  • Big data
  • Exhaust gas
  • Furnace
  • Gas leakage
  • IoT

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