Study of the optical properties of In0.52(AlxGa1-x)0.48As by variable angle spectroscopic ellisometry

J. W. Pan; J. L. Shieh; J. H. Gau; J. I. Chyi

Study of the optical properties of In_0.52(Al_xGa_1-x)_0.48As by variable angle spectroscopic ellisometry

J. W. Pan, J. L. Shieh, J. H. Gau, J. I. Chyi

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

The optical properties of In_0.52(Al_xGa_1-x)_0.48As epilayers with various x values were systematically studied using variable angle spectroscopic ellipsometry in the wavelength range of 310-1700 nm. The refractive indexes were determined. The energies and broadening parameters of the E₁ and E₁+Δ₁ transitions as a function of Al composition were also examined based on the second-derivative spectra of the dielectric function. The comparison between our results and the reported data is presented.

Original language	English
Pages (from-to)	245-248
Number of pages	4
Journal	Conference Proceedings - International Conference on Indium Phosphide and Related Materials
State	Published - 1995
Event	Proceedings of the 7th International Conference on Indium Phosphide and Related Materials - Sapporo, Jpn Duration: 9 May 1995 → 13 May 1995

Cite this

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title = "Study of the optical properties of In0.52(AlxGa1-x)0.48As by variable angle spectroscopic ellisometry",

abstract = "The optical properties of In0.52(AlxGa1-x)0.48As epilayers with various x values were systematically studied using variable angle spectroscopic ellipsometry in the wavelength range of 310-1700 nm. The refractive indexes were determined. The energies and broadening parameters of the E1 and E1+Δ1 transitions as a function of Al composition were also examined based on the second-derivative spectra of the dielectric function. The comparison between our results and the reported data is presented.",

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journal = "Conference Proceedings - International Conference on Indium Phosphide and Related Materials",

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note = "Proceedings of the 7th International Conference on Indium Phosphide and Related Materials ; Conference date: 09-05-1995 Through 13-05-1995",

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TY - JOUR

T1 - Study of the optical properties of In0.52(AlxGa1-x)0.48As by variable angle spectroscopic ellisometry

AU - Pan, J. W.

AU - Shieh, J. L.

AU - Gau, J. H.

AU - Chyi, J. I.

PY - 1995

Y1 - 1995

N2 - The optical properties of In0.52(AlxGa1-x)0.48As epilayers with various x values were systematically studied using variable angle spectroscopic ellipsometry in the wavelength range of 310-1700 nm. The refractive indexes were determined. The energies and broadening parameters of the E1 and E1+Δ1 transitions as a function of Al composition were also examined based on the second-derivative spectra of the dielectric function. The comparison between our results and the reported data is presented.

AB - The optical properties of In0.52(AlxGa1-x)0.48As epilayers with various x values were systematically studied using variable angle spectroscopic ellipsometry in the wavelength range of 310-1700 nm. The refractive indexes were determined. The energies and broadening parameters of the E1 and E1+Δ1 transitions as a function of Al composition were also examined based on the second-derivative spectra of the dielectric function. The comparison between our results and the reported data is presented.

UR - http://www.scopus.com/inward/record.url?scp=0029231785&partnerID=8YFLogxK

M3 - 會議論文

AN - SCOPUS:0029231785

SN - 1092-8669

SP - 245

EP - 248

JO - Conference Proceedings - International Conference on Indium Phosphide and Related Materials

JF - Conference Proceedings - International Conference on Indium Phosphide and Related Materials

T2 - Proceedings of the 7th International Conference on Indium Phosphide and Related Materials

Y2 - 9 May 1995 through 13 May 1995

ER -

Study of the optical properties of In0.52(AlxGa1-x)0.48As by variable angle spectroscopic ellisometry

Abstract

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Study of the optical properties of In_0.52(Al_xGa_1-x)_0.48As by variable angle spectroscopic ellisometry