Study of the optical properties of In0.52(AlxGa 1-x)0.48As by variable angle spectroscopic ellipsometry

J. W. Pan; J. L. Shieh; J. H. Gau; J. I. Chyi; J. C. Lee; K. J. Ling

doi:10.1063/1.360624

Study of the optical properties of In_0.52(Al_xGa _1-x)_0.48As by variable angle spectroscopic ellipsometry

J. W. Pan, J. L. Shieh, J. H. Gau, J. I. Chyi, J. C. Lee, K. J. Ling

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Abstract

The optical properties of In_0.52(Al_xGa _1-x)_0.48As epilayers with various x values were systematically studied using variable angle spectroscopic ellipsometry in the wavelength range of 310-1700 nm. The refractive indexes were determined and could be given as n(x)=0.12x²-0.51x+3.6 at the wavelength of 1.55 μm. The measured thickness of the epilayers agrees within 5.2% of the nominal thickness. The energies and broadening parameters of the E₁ and E₁+Δ₁ transitions as a function of Al composition were also examined based on the second-derivative spectra of the dielectric function. The comparison between the results and the reported data is presented.

Original language	English
Pages (from-to)	442-445
Number of pages	4
Journal	Journal of Applied Physics
Volume	78
Issue number	1
DOIs	https://doi.org/10.1063/1.360624
State	Published - 1995

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title = "Study of the optical properties of In0.52(AlxGa 1-x)0.48As by variable angle spectroscopic ellipsometry",

abstract = "The optical properties of In0.52(AlxGa 1-x)0.48As epilayers with various x values were systematically studied using variable angle spectroscopic ellipsometry in the wavelength range of 310-1700 nm. The refractive indexes were determined and could be given as n(x)=0.12x2-0.51x+3.6 at the wavelength of 1.55 μm. The measured thickness of the epilayers agrees within 5.2% of the nominal thickness. The energies and broadening parameters of the E1 and E1+Δ1 transitions as a function of Al composition were also examined based on the second-derivative spectra of the dielectric function. The comparison between the results and the reported data is presented.",

author = "Pan, {J. W.} and Shieh, {J. L.} and Gau, {J. H.} and Chyi, {J. I.} and Lee, {J. C.} and Ling, {K. J.}",

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T1 - Study of the optical properties of In0.52(AlxGa 1-x)0.48As by variable angle spectroscopic ellipsometry

AU - Pan, J. W.

AU - Shieh, J. L.

AU - Gau, J. H.

AU - Chyi, J. I.

AU - Lee, J. C.

AU - Ling, K. J.

PY - 1995

Y1 - 1995

N2 - The optical properties of In0.52(AlxGa 1-x)0.48As epilayers with various x values were systematically studied using variable angle spectroscopic ellipsometry in the wavelength range of 310-1700 nm. The refractive indexes were determined and could be given as n(x)=0.12x2-0.51x+3.6 at the wavelength of 1.55 μm. The measured thickness of the epilayers agrees within 5.2% of the nominal thickness. The energies and broadening parameters of the E1 and E1+Δ1 transitions as a function of Al composition were also examined based on the second-derivative spectra of the dielectric function. The comparison between the results and the reported data is presented.

AB - The optical properties of In0.52(AlxGa 1-x)0.48As epilayers with various x values were systematically studied using variable angle spectroscopic ellipsometry in the wavelength range of 310-1700 nm. The refractive indexes were determined and could be given as n(x)=0.12x2-0.51x+3.6 at the wavelength of 1.55 μm. The measured thickness of the epilayers agrees within 5.2% of the nominal thickness. The energies and broadening parameters of the E1 and E1+Δ1 transitions as a function of Al composition were also examined based on the second-derivative spectra of the dielectric function. The comparison between the results and the reported data is presented.

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U2 - 10.1063/1.360624

DO - 10.1063/1.360624

M3 - 期刊論文

AN - SCOPUS:0029342270

SN - 0021-8979

VL - 78

SP - 442

EP - 445

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 1

ER -

Study of the optical properties of In0.52(AlxGa 1-x)0.48As by variable angle spectroscopic ellipsometry

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Study of the optical properties of In_0.52(Al_xGa _1-x)_0.48As by variable angle spectroscopic ellipsometry