Aiming at future large silicon tracking devices, 4×8 cm2 silicon microstrip sensors were fabricated, and processes related to such sensors were studied. Fabrication of 4×8 cm2 silicon microstrip sensors from 4 inch wafers had become routine procedure with good yield rate. A 4×64 cm2 long ladder, by assembling eight pieces of 4×8 cm2 sensors together, had been tested at CERN SPS area. Test result shows such detector is feasible.
|Number of pages||4|
|State||Published - 1995|
|Event||Proceedings of the 1994 Nuclear Science Symposium and Medical Imaging Conference. Part 1 (of 4) - Norfolk, VA, USA|
Duration: 30 Oct 1994 → 5 Nov 1994
|Conference||Proceedings of the 1994 Nuclear Science Symposium and Medical Imaging Conference. Part 1 (of 4)|
|City||Norfolk, VA, USA|
|Period||30/10/94 → 5/11/94|