Studies of large area silicon microstrip sensors

Wen Chin Tsay; Jhy Wong Hong; Y. H. Chang; A. Chen; S. R. Hou; S. L. Hsu; C. H. Lin; Willis T. Lin; Hsien Jen Ting; Song Tsang Chiang; Emily Chuang; Su Wen Hwang

Studies of large area silicon microstrip sensors

Wen Chin Tsay, Jhy Wong Hong, Y. H. Chang, A. Chen, S. R. Hou, S. L. Hsu, C. H. Lin, Willis T. Lin, Hsien Jen Ting, Song Tsang Chiang, Emily Chuang, Su Wen Hwang

Research output: Contribution to conference › Paper › peer-review

Abstract

Aiming at future large silicon tracking devices, 4×8 cm² silicon microstrip sensors were fabricated, and processes related to such sensors were studied. Fabrication of 4×8 cm² silicon microstrip sensors from 4 inch wafers had become routine procedure with good yield rate. A 4×64 cm² long ladder, by assembling eight pieces of 4×8 cm² sensors together, had been tested at CERN SPS area. Test result shows such detector is feasible.

Original language	English
Pages	160-163
Number of pages	4
State	Published - 1995
Event	Proceedings of the 1994 Nuclear Science Symposium and Medical Imaging Conference. Part 1 (of 4) - Norfolk, VA, USA Duration: 30 Oct 1994 → 5 Nov 1994

Conference

Conference	Proceedings of the 1994 Nuclear Science Symposium and Medical Imaging Conference. Part 1 (of 4)
City	Norfolk, VA, USA
Period	30/10/94 → 5/11/94

Cite this

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title = "Studies of large area silicon microstrip sensors",

abstract = "Aiming at future large silicon tracking devices, 4×8 cm2 silicon microstrip sensors were fabricated, and processes related to such sensors were studied. Fabrication of 4×8 cm2 silicon microstrip sensors from 4 inch wafers had become routine procedure with good yield rate. A 4×64 cm2 long ladder, by assembling eight pieces of 4×8 cm2 sensors together, had been tested at CERN SPS area. Test result shows such detector is feasible.",

author = "Tsay, {Wen Chin} and Hong, {Jhy Wong} and Chang, {Y. H.} and A. Chen and Hou, {S. R.} and Hsu, {S. L.} and Lin, {C. H.} and Lin, {Willis T.} and Ting, {Hsien Jen} and Chiang, {Song Tsang} and Emily Chuang and Hwang, {Su Wen}",

year = "1995",

language = "???core.languages.en_GB???",

pages = "160--163",

note = "Proceedings of the 1994 Nuclear Science Symposium and Medical Imaging Conference. Part 1 (of 4) ; Conference date: 30-10-1994 Through 05-11-1994",

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TY - CONF

T1 - Studies of large area silicon microstrip sensors

AU - Tsay, Wen Chin

AU - Hong, Jhy Wong

AU - Chang, Y. H.

AU - Chen, A.

AU - Hou, S. R.

AU - Hsu, S. L.

AU - Lin, C. H.

AU - Lin, Willis T.

AU - Ting, Hsien Jen

AU - Chiang, Song Tsang

AU - Chuang, Emily

AU - Hwang, Su Wen

PY - 1995

Y1 - 1995

N2 - Aiming at future large silicon tracking devices, 4×8 cm2 silicon microstrip sensors were fabricated, and processes related to such sensors were studied. Fabrication of 4×8 cm2 silicon microstrip sensors from 4 inch wafers had become routine procedure with good yield rate. A 4×64 cm2 long ladder, by assembling eight pieces of 4×8 cm2 sensors together, had been tested at CERN SPS area. Test result shows such detector is feasible.

AB - Aiming at future large silicon tracking devices, 4×8 cm2 silicon microstrip sensors were fabricated, and processes related to such sensors were studied. Fabrication of 4×8 cm2 silicon microstrip sensors from 4 inch wafers had become routine procedure with good yield rate. A 4×64 cm2 long ladder, by assembling eight pieces of 4×8 cm2 sensors together, had been tested at CERN SPS area. Test result shows such detector is feasible.

UR - http://www.scopus.com/inward/record.url?scp=0029218265&partnerID=8YFLogxK

M3 - 會議論文

AN - SCOPUS:0029218265

SP - 160

EP - 163

T2 - Proceedings of the 1994 Nuclear Science Symposium and Medical Imaging Conference. Part 1 (of 4)

Y2 - 30 October 1994 through 5 November 1994

ER -

Studies of large area silicon microstrip sensors

Abstract

Conference

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