Stress analysis of SiOx: C films deposited by HMDSO/O2 plasma polymerization

  • Bo Yi Lin
  • , Wei Bo Liao
  • , Cheng Chung Jaing
  • , Ya Chen Chang
  • , Ching Long Cheng
  • , Cheng Chung Lee
  • , Chien Cheng Kuo

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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