Stress analysis of SiOx: C films deposited by HMDSO/O2 plasma polymerization

Bo Yi Lin, Wei Bo Liao, Cheng Chung Jaing, Ya Chen Chang, Ching Long Cheng, Cheng Chung Lee, Chien Cheng Kuo

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Chemical Compounds

Engineering & Materials Science