Solid immersion lenses in planar waveguides

De Hao Chien; Chang Heng Tsai; Shih Shou Lo; Chii Chang Chen; Jenq Yang Chang

doi:10.1109/JLT.2005.854036

Solid immersion lenses in planar waveguides

De Hao Chien, Chang Heng Tsai, Shih Shou Lo, Chii Chang Chen, Jenq Yang Chang

Department of Optics and Photonics

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

In this paper, solid immersion lenses (SILs) in silicon-based planar waveguides are designed and fabricated. The lenses are designed by the ray-tracing method to optimize the lens profiles. Experimental results show that a minimum spot size of 0.77 μm can be obtained as the calculation prediction. Hence, the SILs combined with other optical components in planar waveguides can alleviate the alignment, tilt, and packaging problems in free-space optical systems.

Original language	English
Article number	1506853
Pages (from-to)	2746-2748
Number of pages	3
Journal	Journal of Lightwave Technology
Volume	23
Issue number	9
DOIs	https://doi.org/10.1109/JLT.2005.854036
State	Published - Sep 2005

Keywords

Planar waveguides
Solid immersion lenses (SILs)

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10.1109/JLT.2005.854036

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abstract = "In this paper, solid immersion lenses (SILs) in silicon-based planar waveguides are designed and fabricated. The lenses are designed by the ray-tracing method to optimize the lens profiles. Experimental results show that a minimum spot size of 0.77 μm can be obtained as the calculation prediction. Hence, the SILs combined with other optical components in planar waveguides can alleviate the alignment, tilt, and packaging problems in free-space optical systems.",

keywords = "Planar waveguides, Solid immersion lenses (SILs)",

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AU - Tsai, Chang Heng

AU - Lo, Shih Shou

AU - Chen, Chii Chang

AU - Chang, Jenq Yang

PY - 2005/9

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N2 - In this paper, solid immersion lenses (SILs) in silicon-based planar waveguides are designed and fabricated. The lenses are designed by the ray-tracing method to optimize the lens profiles. Experimental results show that a minimum spot size of 0.77 μm can be obtained as the calculation prediction. Hence, the SILs combined with other optical components in planar waveguides can alleviate the alignment, tilt, and packaging problems in free-space optical systems.

AB - In this paper, solid immersion lenses (SILs) in silicon-based planar waveguides are designed and fabricated. The lenses are designed by the ray-tracing method to optimize the lens profiles. Experimental results show that a minimum spot size of 0.77 μm can be obtained as the calculation prediction. Hence, the SILs combined with other optical components in planar waveguides can alleviate the alignment, tilt, and packaging problems in free-space optical systems.

KW - Planar waveguides

KW - Solid immersion lenses (SILs)

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DO - 10.1109/JLT.2005.854036

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Solid immersion lenses in planar waveguides

Abstract

Keywords

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