Solid immersion lenses in planar waveguides

De Hao Chien, Chang Heng Tsai, Shih Shou Lo, Chii Chang Chen, Jenq Yang Chang

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


In this paper, solid immersion lenses (SILs) in silicon-based planar waveguides are designed and fabricated. The lenses are designed by the ray-tracing method to optimize the lens profiles. Experimental results show that a minimum spot size of 0.77 μm can be obtained as the calculation prediction. Hence, the SILs combined with other optical components in planar waveguides can alleviate the alignment, tilt, and packaging problems in free-space optical systems.

Original languageEnglish
Article number1506853
Pages (from-to)2746-2748
Number of pages3
JournalJournal of Lightwave Technology
Issue number9
StatePublished - Sep 2005


  • Planar waveguides
  • Solid immersion lenses (SILs)


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