Small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry

Shinn Fwu Wang; Ming Hung Chiu; Wei Wu Chen; Fu Hsi Kao; Rong Seng Chang

doi:10.1364/AO.48.002566

Small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry

Shinn Fwu Wang, Ming Hung Chiu, Wei Wu Chen, Fu Hsi Kao, Rong Seng Chang

Department of Optics and Photonics

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

Abstract

A small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry is proposed. In this paper, a small displacement can be obtained only by measuring the variation in phase difference between s- and p-polarization states for the total internal reflection effect. In order to improve the sensitivity, we increase the number of total internal reflections by using a parallelogram prism. The theoretical resolution of the method is better than 0:417nm. The method has some merits, e.g., high resolution, high sensitivity, and real-time measurement. Also, its feasibility is demonstrated.

Original language	English
Pages (from-to)	2566-2573
Number of pages	8
Journal	Applied Optics
Volume	48
Issue number	13
DOIs	https://doi.org/10.1364/AO.48.002566
State	Published - 1 May 2009

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abstract = "A small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry is proposed. In this paper, a small displacement can be obtained only by measuring the variation in phase difference between s- and p-polarization states for the total internal reflection effect. In order to improve the sensitivity, we increase the number of total internal reflections by using a parallelogram prism. The theoretical resolution of the method is better than 0:417nm. The method has some merits, e.g., high resolution, high sensitivity, and real-time measurement. Also, its feasibility is demonstrated.",

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AU - Chiu, Ming Hung

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AU - Kao, Fu Hsi

AU - Chang, Rong Seng

PY - 2009/5/1

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N2 - A small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry is proposed. In this paper, a small displacement can be obtained only by measuring the variation in phase difference between s- and p-polarization states for the total internal reflection effect. In order to improve the sensitivity, we increase the number of total internal reflections by using a parallelogram prism. The theoretical resolution of the method is better than 0:417nm. The method has some merits, e.g., high resolution, high sensitivity, and real-time measurement. Also, its feasibility is demonstrated.

AB - A small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry is proposed. In this paper, a small displacement can be obtained only by measuring the variation in phase difference between s- and p-polarization states for the total internal reflection effect. In order to improve the sensitivity, we increase the number of total internal reflections by using a parallelogram prism. The theoretical resolution of the method is better than 0:417nm. The method has some merits, e.g., high resolution, high sensitivity, and real-time measurement. Also, its feasibility is demonstrated.

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Small-displacement sensing system based on multiple total internal reflections in heterodyne interferometry

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