Abstract
A sliding-mode controller (SMC) for a two-dimensional piezo-positioning stage is proposed. A mathematical model representing the motion dynamics of the stage is developed in which a hysteresis friction force describing the hysteresis behaviour of one-dimensional motion is used and a non-contant stiffness with the cross-coupling dynamics due to the effect of bending of lever mechanism in the x and y axes is also included. Based on the dynamic model, the proposed SMC with an asymptotic sliding surface is designed. A stability anslysis is performed, and the transient performance is governed by the choice of control parameter values. With the proposed control scheme, the piezo-positioning stage is suitable for practical applications, especially in microscopy, with its need for validity of various trajectories. Experimental results show that the proposed controller provides high-performance dynamic characteristics and robustness to external load.
| Original language | English |
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| Pages (from-to) | 1104-1113 |
| Number of pages | 10 |
| Journal | IET Control Theory and Applications |
| Volume | 1 |
| Issue number | 4 |
| DOIs | |
| State | Published - 2007 |