Sinusoidal trajectory for atomic force microscopy precision local scanning with auxiliary optical microscopy

Chih Lieh Chen, Jim Wei Wu, Yi Ting Lin, Yu Ting Lo, Li Chen Fu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Scopus citations


Atomic force microscopy (AFM) is a useful measurement instrument which can build three-dimensional topography image of conductive and nonconductive samples at high resolution. However, due to the scanning trajectory of conventional AFM, the induced mechanical resonance of the scanner and uninteresting area scanning would limit the scanning speed. In this paper, we improve these problems with our designed AFM system from three aspects. First, the sinusoidal trajectory is applied to AFM lateral scanning rather than the traditional raster trajectory, so the scanning rate can be increased without inducing vibration of the lateral scanner. Second, with this well-known trajectory, the neural network complementary sliding mode controller (NNCSMC) based on internal model principle (IMP) is proposed to achieve high precision scanning and to cope with the system parameter uncertainties and external disturbance. Finally, with the aid of an auxiliary optical microscopy which is usually used for calibration, a simple path planning method can be adopted to focus the scanning on the samples for the purpose of removing the redundant background scanning for shortening the total scanning time. Experimental results are provided to demonstrate the effectiveness of the proposed method.

Original languageEnglish
Title of host publication2013 IEEE 52nd Annual Conference on Decision and Control, CDC 2013
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages6
ISBN (Print)9781467357173
StatePublished - 2013
Event52nd IEEE Conference on Decision and Control, CDC 2013 - Florence, Italy
Duration: 10 Dec 201313 Dec 2013

Publication series

NameProceedings of the IEEE Conference on Decision and Control
ISSN (Print)0743-1546
ISSN (Electronic)2576-2370


Conference52nd IEEE Conference on Decision and Control, CDC 2013


  • Atomic force microscopy (AFM)
  • Complementary sliding mode control
  • Internal model principle
  • Local scanning
  • Neural network
  • Sinusoidal trajectory


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