Single-mode vertical-cavity surface-emitting laser array with high power and narrow far-field divergence angle

Jin Wei Shi, Kai Lun Chi, Jin Hao Chang, Zhi Rui Wei, Jia Wei Jiang, Ying Jay Yang

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

We demonstrate novel structures of an 850-nm vertical-cavity surface-emitting laser (VCSEL) array for high output power, single-lobe far-field pattern, and narrow divergence angle. By using the Zn-diffusion process with proper sizes of oxide-current-confined and Zn-diffusion apertures, each unit of VCSEL in the demonstrated array is highly single-mode (side-mode suppression ratio > 30 dB) with a narrow far-field divergence angle (9 \circ-10^{\circ}) and high maximum single-mode output power ( \sim6.3 mW). Due to the high uniformity of single-mode performance of each VCSEL unit, the 6 \times 6 array exhibits an excellent lasing phenomenon, which includes single-lobe far-field pattern, weak in-phase coupling, narrowing of divergence angle (from 9\circ to 4 \circ), and output power as high as around 104 mW. Furthermore, by measuring the bias-dependent output optical spectra in different positions of our array, the high similarity of these spectra indicates the excellent uniformity of our fabrication process for single-mode VCSEL.

Original languageEnglish
Article number6648673
JournalIEEE Photonics Journal
Volume5
Issue number6
DOIs
StatePublished - 2013

Keywords

  • laser beam combing
  • Semiconductor lasers

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