Simulation of a high compliant micro electromagnetic generator for energy harvesting

Jia Yin Wu, Shih Jui Chen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper describes modeling and simulation of a micro electromagnetic generator for vibration energy harvesting. High compliant diaphragms, including cantilever and spiral, are characterized by using CoventorWare™ on the vibration frequency and amplitude. Simulation results show that a spiral diaphragm has higher compliance and lower resonant frequency than a cantilever diaphragm. The generator with proof mass on this diaphragm has larger vibration amplitude, and it generates higher power output at a lower frequency. The compact generator occupies a volume of 10x5.5x1 mm 3, and is compatible with MEMS fabrication techniques. Based on the Faraday's law of induction, the spiral diaphragm with proof mass provides large rate of change of the magnetic flux. The generator can generate electromotive force at a vibration frequency of 13.95 Hz and amplitude of 1306.88 μm under 1g acceleration with high energy conversion efficiency.

Original languageEnglish
Title of host publicationNanotechnology 2012
Subtitle of host publicationElectronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012
Pages606-608
Number of pages3
StatePublished - 2012
EventNanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012 - Santa Clara, CA, United States
Duration: 18 Jun 201221 Jun 2012

Publication series

NameTechnical Proceedings of the 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012

Conference

ConferenceNanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2012 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2012
Country/TerritoryUnited States
CitySanta Clara, CA
Period18/06/1221/06/12

Keywords

  • Electromagnetic generator
  • Energy harvest
  • MEMS

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