Simple embossing process for fabricating GMR biosensor with variable waveguide thickness

This work demonstrates a simple fabrication process for the guided-mode resonance biosensors with tunable waveguide thickness. For various waveguide thicknesses, the grating parameters can still keep the same. Although consisted of the waveguide layer and the grating layer, the GMR biosensor can be simply fabricated in a single step and of the same material by the conventional embossing technique. Moreover, the thickness of waveguide can be well controlled by applying various forces. It is shown that the tunable range of the waveguide thickness is approximately to 600nm and the deformation on the grating layer still keeps less than 10%.