Silicon based guided-mode Resonance nano-photonic device

C. M. Wang, C. L. Xu, J. Y. Chang, C. C. Lee

Research output: Contribution to journalConference articlepeer-review


An out-of-plane guided-mode resonance (GMR) filter on a single Si chip using a two-layer polysilicon surface micromachining process was proposed. To the best of our knowledge, this is the first time that a monolithic optical filter has been integrated on a silicon microoptical bench. This device can be used as a bi-directional transceiver filter. The extinction ratio between 1550nm and 1310nm could be as low as 40dB and the channel passband at 1550nm was 20nm.

Original languageEnglish
Article number45
Pages (from-to)275-278
Number of pages4
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2004
EventNanoengineering: Fabrication, Properties, Optics, and Devices - Denver, CO, United States
Duration: 4 Aug 20046 Aug 2004


  • Filter
  • Guided-mode resonance
  • Surface micromachining


Dive into the research topics of 'Silicon based guided-mode Resonance nano-photonic device'. Together they form a unique fingerprint.

Cite this