Silicon based guided-mode Resonance nano-photonic device

C. M. Wang; C. L. Xu; J. Y. Chang; C. C. Lee

doi:10.1117/12.559209

Silicon based guided-mode Resonance nano-photonic device

C. M. Wang, C. L. Xu, J. Y. Chang, C. C. Lee

Research output: Contribution to journal › Conference article › peer-review

Abstract

An out-of-plane guided-mode resonance (GMR) filter on a single Si chip using a two-layer polysilicon surface micromachining process was proposed. To the best of our knowledge, this is the first time that a monolithic optical filter has been integrated on a silicon microoptical bench. This device can be used as a bi-directional transceiver filter. The extinction ratio between 1550nm and 1310nm could be as low as 40dB and the channel passband at 1550nm was 20nm.

Original language	English
Article number	45
Pages (from-to)	275-278
Number of pages	4
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5515
DOIs	https://doi.org/10.1117/12.559209
State	Published - 2004
Event	Nanoengineering: Fabrication, Properties, Optics, and Devices - Denver, CO, United States Duration: 4 Aug 2004 → 6 Aug 2004

Keywords

Filter
Guided-mode resonance
Surface micromachining

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10.1117/12.559209

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T1 - Silicon based guided-mode Resonance nano-photonic device

AU - Wang, C. M.

AU - Xu, C. L.

AU - Chang, J. Y.

AU - Lee, C. C.

PY - 2004

Y1 - 2004

N2 - An out-of-plane guided-mode resonance (GMR) filter on a single Si chip using a two-layer polysilicon surface micromachining process was proposed. To the best of our knowledge, this is the first time that a monolithic optical filter has been integrated on a silicon microoptical bench. This device can be used as a bi-directional transceiver filter. The extinction ratio between 1550nm and 1310nm could be as low as 40dB and the channel passband at 1550nm was 20nm.

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KW - Filter

KW - Guided-mode resonance

KW - Surface micromachining

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M3 - 會議論文

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JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 45

T2 - Nanoengineering: Fabrication, Properties, Optics, and Devices

Y2 - 4 August 2004 through 6 August 2004

ER -

Silicon based guided-mode Resonance nano-photonic device

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Keywords

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