Si nanophotonics based cantilever sensor

Chengkuo Lee, Jayaraj Thillaigovindan, Chii Chang Chen, Xian Tong Chen, Ya Ting Chao, Shaohua Tao, Wenfeng Xiang, Aibin Yu, Hanhua Feng, G. Q. Lo

Research output: Contribution to journalArticlepeer-review

48 Scopus citations


We present design and simulation results of a novel nanomechanical sensor using silicon cantilever embedded with a two-dimensional photonic crystal microcavity resonator. Both of resonant wavelength and resonant wavelength shift could be measured as a function of various physical parameters such as applied force, strain, and displacement. Rather linear relationship is derived for strain and resonant wavelength shift. This new nanomechanical sensor shows promising features for biomolecules detection.

Original languageEnglish
Article number113113
JournalApplied Physics Letters
Issue number11
StatePublished - 2008


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