Si-based guided-mode resonance filter on a micro-optical bench

C. M. Wang, J. Y. Chang, C. L. Hsu, C. C. Lee, J. C. Yang

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


An out-of-plane guided-mode resonance filter on a single Si chip using a two-layer polysilicon surface micromachining process has been proposed. To the best of the authors' knowledge, this is the first time that a monolithic optical filter has been integrated on a silicon micro-optical bench. This device can be used as a bi-directional transceiver filter. The extinction ratio between 1550 and 1310 nm could be as low as 40 dB and the channel passband at 1550 nm was 20 nm.

Original languageEnglish
Pages (from-to)1335-1336
Number of pages2
JournalElectronics Letters
Issue number21
StatePublished - 14 Oct 2004


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