Sensitive optical monitoring with error compensation

Kai Wu, Sheng Hui Chen, Ming Sheng Chang, Cheng Chung Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


A way to calculate fluctuant refractive indices and thickness compensation during the deposition has been proposed. A novel monitor method was thereby derived, and a narrow band pass filter with excellent performance has been demonstrated.

Original languageEnglish
Title of host publicationOptical Interference Coatings, OIC 2007
PublisherOptical Society of America (OSA)
ISBN (Print)1557528411, 9781557528414
StatePublished - 2007
EventOptical Interference Coatings, OIC 2007 - Tucson, AZ, United States
Duration: 3 Jun 20073 Jun 2007

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701


ConferenceOptical Interference Coatings, OIC 2007
Country/TerritoryUnited States
CityTucson, AZ


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