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Abstract
AlN nanopyramids with semipolar facets are grown by metal-organic chemical vapor deposition (MOCVD) on the AlN substrate attained with compressed AlN powders. Surface qualities of the polycrystalline substrate are improved with an AlN buffer layer deposited by sputtering, followed by appropriate post annealing. It is found that a pulsed flow condition of ammonia (NH3) during the MOCVD growth can effectively enhance morphologic uniformity and crystallinity of the nanopyramids. The semipolar AlN nanopyramids serve as a promising template for ultraviolet emitters, considering their increased surface area and reduced polarization fields.
Original language | English |
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Article number | 1700127 |
Journal | Physica Status Solidi (A) Applications and Materials Science |
Volume | 214 |
Issue number | 12 |
DOIs | |
State | Published - Dec 2017 |
Keywords
- AlN
- MOCVD
- nanopyramids
- semipolar
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Dive into the research topics of 'Self-Assembly Semipolar AlN Nanopyramids Grown on Powder-Compressed AlN Substrates'. Together they form a unique fingerprint.Projects
- 1 Finished
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A Label-Free Biosensor Built with Nitride-Based Surface Plasmon Resonance
Lai, K.-Y. (PI)
1/08/16 → 31/07/17
Project: Research