Scream for multi-level movable structures by inductively coupled plasma process

Yu Hsin Lin; Hung Ling Yin; Yung Yu Hsu; Yi Chiuen Hu; Hsiao Yu Chou; Tsung Hsun Yang

doi:10.1115/IMECE2002-33382

Scream for multi-level movable structures by inductively coupled plasma process

Yu Hsin Lin, Hung Ling Yin, Yung Yu Hsu, Yi Chiuen Hu, Hsiao Yu Chou, Tsung Hsun Yang

Department of Optics and Photonics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

A novel fabrication process to etch, to passivate, and to release single-crystal silicon structures totally in just only one process by inductively coupled plasma reactive ion etching (ICP-RIE) has been presented in this paper. Several kinds of movable actuators such as relay, comb-drive, and capacitance with thickness of 30• m have been fabricated successfully to demonstrate this fabrication process. Here, experimental investigations about fabrication parameters to get well profile and suspension structures are performed in a STS ICP-RIE system.

Original language	English
Title of host publication	Microelectromechanical Systems
Publisher	American Society of Mechanical Engineers (ASME)
Pages	347-350
Number of pages	4
ISBN (Print)	0791836428, 9780791836422
DOIs	https://doi.org/10.1115/IMECE2002-33382
State	Published - 2002

Publication series

Name	ASME International Mechanical Engineering Congress and Exposition, Proceedings

Keywords

Actuators
Inductively coupled plasma reactive ion etching (ICP-RIE)
Micro-Electro-Mechanical systems (MEMS)

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10.1115/IMECE2002-33382

Cite this

Lin, Y. H., Yin, H. L., Hsu, Y. Y., Hu, Y. C., Chou, H. Y., & Yang, T. H. (2002). Scream for multi-level movable structures by inductively coupled plasma process. In Microelectromechanical Systems (pp. 347-350). (ASME International Mechanical Engineering Congress and Exposition, Proceedings). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE2002-33382

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Scream for multi-level movable structures by inductively coupled plasma process. / Lin, Yu Hsin; Yin, Hung Ling; Hsu, Yung Yu et al.
Microelectromechanical Systems. American Society of Mechanical Engineers (ASME), 2002. p. 347-350 (ASME International Mechanical Engineering Congress and Exposition, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Yang, Tsung Hsun

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Scream for multi-level movable structures by inductively coupled plasma process

Abstract

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Keywords

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