Scatterometer and intensity distribution meter with screen image synthesis

Yeh Wei Yu, Tsung Hsun Yang, Ching Cherng Sun, Yun Hsuan Lin, Ming Le, Chih Wei Chen, Po Kai Hsieh, X. H. Lee

Research output: Contribution to journalArticlepeer-review

Abstract

A screen image synthesis (SIS) system is superior than the conventional methods in terms of high-speed measurement and low screen-cross-talk noise when used as a whole-field light-distribution meter. However, reflection signals cannot be measured using the conventional SIS system when it is used as a scattering meter. Furthermore, the conventional SIS system cannot be used to measure a large sample when it is used as an intensity distribution meter. In this study, we devised a rail-based SIS system as long as an image reconstruction algorithm. This would allow whole-field scattering light and intensity distribution measurements for various sample sizes. For this purpose, a versatile instrument was assembled by combining a whole-field intensity distribution meter and a whole-field scattering meter. The results of the experiments confirmed that the measuring time was drastically improved when the proposed instrument was used as a whole-field intensity distribution meter and a whole-field scattering meter. The high normalized cross correlation values of both measurements demonstrated the accuracy and feasibility of the proposed algorithm.

Original languageEnglish
Article number9209040
JournalIEEE Photonics Journal
Volume12
Issue number5
DOIs
StatePublished - Oct 2020

Keywords

  • BSDF
  • SIS system
  • goniophotometer
  • scatterometer
  • screen image synthesis

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