Resonant efficiency improvement design of piezoelectric biosensor for bacteria gravimetric sensing

Jang Zern Tsai, Ching Jung Chen, Dung Ting Shie, Jen Tsai Liu

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


The piezoelectric biosensor have been widely used in ultra-small mass detection of biomolecular, based on PZT piezoelectric material can create a variety of compositions geometrically; it could widely develop a high-frequency resonator and measure the change of the slightest mass while improve the limited detection simultaneously. Therefore, the piezoelectric biosensor of this study was fabricated by a spin-coating method and backside etching process for improving the characteristic of piezoelectric biosensor. The result exhibited that the 250 μm × 250 μm working size has the most favorable piezoelectric characteristic. The tunability was approximately 38.56 % and it showed that reducing the substrate thickness could obtain a clear resonance signal in a range of 60 to 380 MHz. In theory calculated for gravimetric sensing, it could achieve 0.1 ng sensing sensitivity. In gravimetric sensing, the sensing range was between 50,000~100,000 CFU/ml. Sensing range was lower in clinical urinary tract infection (100,000 CFU/ml), thus demonstrating its usefulness for preventive medicine. It can understand the piezoelectric sensor of this study has potential application in the future for biomedical gravimetric sensing.

Original languageEnglish
Pages (from-to)3597-3604
Number of pages8
JournalBio-Medical Materials and Engineering
Issue number6
StatePublished - 2014


  • Biosensor
  • Escherichia coli (E. coli)
  • Lead zirconate titanate (PZT)
  • Piezoelectric
  • Resonance-frequency


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