Replication of nano/micro-scale features using bulk metallic glass mold prepared by femtosecond laser and imprint processes

Y. C. Chen, J. P. Chu, J. S.C. Jang, C. W. Hsieh, Y. Yang, C. L. Li, Y. M. Chen, J. Y. Jeng

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Abstract

This study describes the replication of nano/micro-scale features using a Pd40Ni40P20 bulk metallic glass (BMG) mold prepared using a femtosecond laser and nanoimprinting process. The use of the beam shaper feature of the femtosecond laser enabled the rapid fabrication of periodic nanostripes over an area of ∼5 × 4 mm2 on the BMG mold following a single pulse of irradiation. The ablation pitch of the nanostructure irradiated with 100 mW of femtosecond laser power was determined to be 175.8 nm. The imprinting results demonstrate the applicability of Pd-based BMG in the replication of mold features ranging from 100 μm to 90 nm. Additionally, Pd-based BMG can itself be used as a mold to transfer features onto Au-based BMG and polydimethylsiloxane, where the results could be used to ascertain the workability of BMG for molding in a nano/micro-imprint process.

Original languageEnglish
Article number035030
JournalJournal of Micromechanics and Microengineering
Volume23
Issue number3
DOIs
StatePublished - Mar 2013

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