Removal of C 3F 8 via the combination of non-thermal plasma, adsorption and catalysis

Bor Yuan Lin, Moo Been Chang, Hsin Liang Chen, How Ming Lee, Sheng Jen Yu, Shou Nan Li

Research output: Contribution to journalArticlepeer-review

10 Scopus citations


The feasibility of C 3F 8 abatement via combining nonthermal plasma with adsorption and/or catalysis is investigated in this study. In terms of the simultaneous combination of plasma, adsorption and catalysis (CPAC), three different configurations including A/C layer (adsorbent layer prior to catalyst layer), C/A layer (catalyst layer prior to adsorbent layer) and A/C mixture (adsorbent and catalyst are mechanically mixed) are adopted. For all the experimental tests conducted in this study, the gas stream consists of 500 ppm C 3F 8, 2% O 2, and balanced N 2. The experimental results indicate that C 3F 8 removal efficiencies depend on what kind of packing material is adopted (adsorbent, catalyst or both) and how the material is packed within the plasma reactor. The removal efficiencies obtained with different reactors are in the order as: CPAC (A/C layer; AC mixture) > CPA (plasma with adsorbent alone) > CPC (plasma with catalyst alone) > CPAC (C/A layer). The indentified products after treatment include CO 2, CO, N 2O and CF 4. The formation of C 2F 6 is not observed in this study, which is encouraging since the global warming potential of C 2F 6 is actually higher than that of C 3F 8.

Original languageEnglish
Pages (from-to)585-594
Number of pages10
JournalPlasma Chemistry and Plasma Processing
Issue number4
StatePublished - Aug 2011


  • Adsorbent
  • Global warming
  • Greenhouse gases (GHGs)
  • Perfluorocompounds (PFCs)
  • Plasma catalysis


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