Refractive index and thickness of coating measurement interferometer

Chao Yuan Wu, Kai Wu, Sheng Hui Chen, Cheng Chung Leea

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations


We proposed a method to measure the optical constants of thin film through polarizing phase shifting interferometer based on Twyman-Green interferometer structure. A broadband light source coming with a narrow band-pass filter was used to generate a low coherence light and the wavelength is tunable by changing the filter. A pixelated micro-polarizer mask on the detection camera made phase shifting array to make different phase shifts at once. Therefore, we can use one single interferogram to extract phase information, and it is effective in reducing environmental vibration. The refractive index and thickness of thin film can be derived from the obtained reflection coefficient's magnitude and phase. The measurement results were compared with the results obtained by an ellipsometer.

Original languageEnglish
Title of host publicationThin Film Solar Technology
StatePublished - 2009
EventThin Film Solar Technology - San Diego, CA, United States
Duration: 2 Aug 20094 Aug 2009

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceThin Film Solar Technology
Country/TerritoryUnited States
CitySan Diego, CA


  • Dynamic interferometer
  • Optical admittance
  • Optical constants
  • Thin film


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