Refining silicon nitride waveguide quality through femtosecond laser annealing

  • Pei Hsun Wang
  • , Chien Hung Chen
  • , Nien Lin Hou
  • , Jia Hao Cao
  • , He Yuan Zheng
  • , Hung Wen Chen

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

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Material Science