Reduced interface States of atomic-layer-deposited Al2O3/AlGaN/GaN heterostructure containing in situ grown AlN/GaN cap layer and subjected to thermal oxidation

Wen Chia Liao, Chen Ting Chiang, Jen Inn Chyi, Yue Ming Hsin

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Reduced interface States of atomic-layer-deposited Al2O3/AlGaN/GaN heterostructure containing in situ grown AlN/GaN cap layer and subjected to thermal oxidation'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds