Recent advances in two-photon 3D laser lithography with self-Qswitched Nd:YAG microchip lasers

Patrice L. Baldeck, Prem Prabakharan, Chao Yuan Liu, Michel Bouriau, Laetitia Gredy, Olivier Stephan, Thomas Vergote, Hélne Chaumeil, Jean Pierre Malval, Yi Hsiung Lee, Chih Lang Lin, Chin Te Lin, Ya Hsun Hsueh, Tien Tung Chung

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

We review our recent results towards the development of a turnkey 3D laser printer, based on self-Q-switched microchip Nd:YAG lasers, with reproducible sub-100nm resolution, and with large-scale (cm) and fast-speed (cm/sec) capability at micron resolution. First of all, we report on line fabrication with 70nm lateral, and 150nm longitudinal resolutions without significant shrinking. This is due to the tight focusing with green visible wavelength, large numerical aperture, and excellent resin properties. Secondly, we report on two-photon sensitive photoacid generators that lead to efficient 3D microfabrication with epoxy SU-8 resin. Thirdly, we demonstrate high-speed microfabrication of large scale, millimeter size, scaffolds and cemtimeter height needle with high repetition rate (130Khz), and high average power (1W) amplified microchip laser. Finally we demonstrate the two-photon induced cross-linking of antibodies to determine the type of red blood cells in microfluidic channels.

Original languageEnglish
Title of host publicationOptical Processes in Organic Materials and Nanostructures II
DOIs
StatePublished - 2013
EventOptical Processes in Organic Materials and Nanostructures II - San Diego, CA, United States
Duration: 25 Aug 201328 Aug 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8827
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceOptical Processes in Organic Materials and Nanostructures II
Country/TerritoryUnited States
CitySan Diego, CA
Period25/08/1328/08/13

Keywords

  • 3D microfabrication
  • Microchip lasers.
  • Q-switched Nd:YAG
  • Two-photon absorption

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