Realization of optical pickup head by using stacked silicon based microoptical system

C. M. Wang, H. C. Lan, J. Y. Chang, C. C. Lee

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations


We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650nm laser diode, a 45° silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were free-standing on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 μm.

Original languageEnglish
Article number13
Pages (from-to)115-124
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2004
EventNovel Optical Systems Design and Optimization VII - Denver, CO, United States
Duration: 2 Aug 20043 Aug 2004


  • Anisotropic etching
  • Diffractive optical elements
  • Microoptics
  • SiNx film


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