Realization of optical pickup head by using stacked silicon based microoptical system

C. M. Wang; H. C. Lan; J. Y. Chang; C. C. Lee

doi:10.1117/12.559213

Realization of optical pickup head by using stacked silicon based microoptical system

C. M. Wang, H. C. Lan, J. Y. Chang, C. C. Lee

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650nm laser diode, a 45° silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were free-standing on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 μm.

Original language	English
Article number	13
Pages (from-to)	115-124
Number of pages	10
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5524
DOIs	https://doi.org/10.1117/12.559213
State	Published - 2004
Event	Novel Optical Systems Design and Optimization VII - Denver, CO, United States Duration: 2 Aug 2004 → 3 Aug 2004

Keywords

Anisotropic etching
Diffractive optical elements
Microoptics
SiNx film

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10.1117/12.559213

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title = "Realization of optical pickup head by using stacked silicon based microoptical system",

abstract = "We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650nm laser diode, a 45° silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were free-standing on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 μm.",

keywords = "Anisotropic etching, Diffractive optical elements, Microoptics, SiNx film",

author = "Wang, {C. M.} and Lan, {H. C.} and Chang, {J. Y.} and Lee, {C. C.}",

year = "2004",

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TY - JOUR

T1 - Realization of optical pickup head by using stacked silicon based microoptical system

AU - Wang, C. M.

AU - Lan, H. C.

AU - Chang, J. Y.

AU - Lee, C. C.

PY - 2004

Y1 - 2004

N2 - We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650nm laser diode, a 45° silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were free-standing on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 μm.

AB - We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650nm laser diode, a 45° silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were free-standing on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 μm.

KW - Anisotropic etching

KW - Diffractive optical elements

KW - Microoptics

KW - SiNx film

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M3 - 會議論文

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SN - 0277-786X

VL - 5524

SP - 115

EP - 124

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 13

T2 - Novel Optical Systems Design and Optimization VII

Y2 - 2 August 2004 through 3 August 2004

ER -

Realization of optical pickup head by using stacked silicon based microoptical system

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Keywords

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