Realization of free-space optical pickup head with stacked Si-based phase elements

Jenq Yang Chang, Chih Ming Wang, Chien Chieh Lee, Hsi Fu Shih, Mount Learn Wu

Research output: Contribution to journalArticlepeer-review

15 Scopus citations


We have developed a novel stacked silicon-based microoptical system, which is optical-on-axis and transmissible in both visible and infrared ranges. By using the new microoptical system techniques, we fabricated a miniaturized optical pickup head module. This optical pickup head consisted of a 650-nm laser diode, a 45° silicon reflector, a grating, a holographic optical element, and some aspherical Fresnel lenses. These optical phase elements fabricated on a SiNx membrane were suspended on Si chips. Each element was then stacked by chip bonding. We could obtain a circular focusing spot on the optical disc as small as 3.1 μm.

Original languageEnglish
Pages (from-to)214-216
Number of pages3
JournalIEEE Photonics Technology Letters
Issue number1
StatePublished - Jan 2005


  • Diffractive optical elements
  • Microoptoelectromechanical systems (MOEMS)
  • Pickup module
  • SiN membrane


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