Abstract
We present an in-process measurement of surface roughness by combining an optical probe of laser-scattering phenomena and adaptive optics for aberration correction. Measurement results of five steel samples with a roughness ranging from 0.2 to 3.125 ?mdemonstrate excellent correlation between the peak power and average roughness with a correlation coefficient (R2) of 0.9967. The proposed adaptive-optics-assisted system is in good agreement with the stylus method, and error values of less than 8.7% are obtained for average sample roughness in the range of 0.265 to 1.119 μm. The proposed system can be used as a rapid in-process roughness monitor/estimator to further increase the precision and stability of manufacturing processes in situ.
| Original language | English |
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| Pages (from-to) | 848-850 |
| Number of pages | 3 |
| Journal | Optics Letters |
| Volume | 37 |
| Issue number | 5 |
| DOIs | |
| State | Published - 1 Mar 2012 |