Rapid in-process measurement of surface roughness using adaptive optics

Yiin Kuen Fuh, Kuo Chan Hsu, Jia Ren Fan

Research output: Contribution to journalArticlepeer-review

29 Scopus citations


We present an in-process measurement of surface roughness by combining an optical probe of laser-scattering phenomena and adaptive optics for aberration correction. Measurement results of five steel samples with a roughness ranging from 0.2 to 3.125 ?mdemonstrate excellent correlation between the peak power and average roughness with a correlation coefficient (R2) of 0.9967. The proposed adaptive-optics-assisted system is in good agreement with the stylus method, and error values of less than 8.7% are obtained for average sample roughness in the range of 0.265 to 1.119 μm. The proposed system can be used as a rapid in-process roughness monitor/estimator to further increase the precision and stability of manufacturing processes in situ.

Original languageEnglish
Pages (from-to)848-850
Number of pages3
JournalOptics Letters
Issue number5
StatePublished - 1 Mar 2012


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