Rapid Fabrication of 100 nm or Thinner Fully Depleted Silicon-on-Insulator Materials for Ultralow Energy Consumption

Keyphrases

• Ultra-low Power 100%
• Silicon-on-insulator 100%
• FDSOI 100%
• Rapid Manufacturing 100%
• Solid Phase Epitaxial Regrowth 60%
• Buffer Layer 40%
• Silicon Layer 40%
• Silicon-on-insulator Wafer 40%
• Hydrogen Ion 40%
• Growth Techniques 40%
• Damaged Layer 40%
• Polishing Step 40%
• Ion-cutting 40%
• Clad Layer 40%
• Crystalline Structure 20%
• Impurities 20%
• Artificial Intelligence 20%
• Internet of Things 20%
• Wearable Devices 20%
• Silica 20%
• Insulator 20%
• Process-based 20%
• Hydrogen Concentration 20%
• SOI Wafer 20%
• Ion Implanter 20%
• Display Manufacturing 20%
• One-step Fabrication 20%
• Amorphization 20%
• Oxidized Surface 20%
• Sacrificial Layer 20%
• Main Technologies 20%
• Insulator Substrate 20%
• Recrystallization 20%
• Regrowth 20%
• Blister 20%
• Defect Clusters 20%
• Flat Panel Display 20%
• Crystal Layer 20%
• Argon Annealing 20%
• Thick SOI 20%
• Seed Layer 20%
• Supersaturation 20%
• Direct Fabrication 20%
• Silicon on Insulator Technology 20%
• Automotive Devices 20%
• Crystal Segregation 20%

Material Science

• Silicon 100%
• Silicon on Insulator Material 100%
• Epitaxy 33%
• Buffer Layer 22%
• Amorphization 11%
• Supersaturation 11%
• Surface (Surface Science) 11%
• Crystal Structure 11%