Raised source/drain (Rsd) and vertical lightly doped drain (LDD) poly-Si thin-film transistor

Keyphrases

• Polycrystalline Silicon Thin-film Transistors (poly-Si TFTs) 100%
• Raised Source Drain 100%
• Lightly Doped Drain 100%
• Electric Field (E-field) 45%
• Device Characteristics 18%
• Thickness Profile 9%
• Thin-film Transistors 9%
• Output Characteristics 9%
• Systems Engineering 9%
• Uniform Doping 9%
• Doping Profile 9%
• Impact Ionization Coefficients 9%
• ISE TCAD 9%
• Traditional Devices 9%

Engineering

• Thin-Film Transistor 100%
• Electric Field 100%
• Polysilicon 100%
• Integrated System 20%
• Impact Ionization 20%
• Ionization Rate 20%

Material Science

• Thin-Film Transistor 100%