Abstract
A new method for preventing the periodic nonlinearity in heterodyne interferometer is presented. This method is based on the non-polarizing configuration. To experimentally verify this new configuration, a real displacement is measured. The periodic nonlinearity of less than 7 pm is demonstrated. Our system has some merits, such as simple optical setup, easy operation, and fewer optical components are used. In addition, compared with conventional interferometer, it has double measurement resolution.
| Original language | English |
|---|---|
| Pages | 5 |
| Number of pages | 1 |
| State | Published - 2002 |
| Event | Proceeding of the International Symposium on Precision Mechanical Measurements, ISIST 2002 - Hefei, China Duration: 11 Aug 2002 → 16 Aug 2002 |
Conference
| Conference | Proceeding of the International Symposium on Precision Mechanical Measurements, ISIST 2002 |
|---|---|
| Country/Territory | China |
| City | Hefei |
| Period | 11/08/02 → 16/08/02 |
Keywords
- Heterodyne Interferometry
- Periodic Nonlinearity Error