@inproceedings{680e7cfcfd7e490a8de65e38671c3fd3,
title = "Prevention of nonlinearity in heterodyne interferometer with new non-polarizing configuration",
abstract = "A new method for preventing the periodic nonlinearity in heterodyne interferometer is presented. This method is based on the non-polarizing configuration. To experimentally verify this new configuration, a real displacement is measured. The periodic nonlinearity of less than 7 pm is demonstrated. Our system has some merits, such as simple optical setup, easy operation, and fewer optical components are used. In addition, compared with conventional interferometer, it has double measurement resolution.",
keywords = "Heterodyne interferometry, Periodic nonlinearity error",
author = "Lee, {Ju Yi} and Chang, {Wei Cheng}",
year = "2002",
language = "???core.languages.en_GB???",
isbn = "7560317685",
series = "Proceedings of the Second International Symposium on Instrumentation Science and Technology",
pages = "4/005--4/009",
editor = "K.-C. Fan and F. Yetai and K-.C. Fan and F. Yetai",
booktitle = "Proceedings of the Second International Symposium on Instrumentation Science and Technology",
note = "Proceedings of the International Symposium on Precision Mechanical Measurement ; Conference date: 11-08-2002 Through 16-08-2002",
}