Precise determination of absolute coverage of thin films by layer-resolved surface states

Cheng Maw Cheng, Ku Ding Tsuei, Chi Ting Tsai, Dah An Luh

Research output: Contribution to journalArticlepeer-review

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Abstract

We report a technique to determine the coverage of metallic thin films by analyzing layer-resolved surface states with photoemission by using atomically flat AgAu (111) thin films as a test system. We analyzed the surface state on Au(111) covered with Ag up to 4 ML with atomic resolution, and precisely determined the total Ag coverage of AgAu (111) through a line-shape analysis. With precise measurements of the absolute coverage of thin films becoming possible, one can calibrate the tooling factor of evaporators with unprecedented accuracy.

Original languageEnglish
Article number163102
JournalApplied Physics Letters
Volume92
Issue number16
DOIs
StatePublished - 2008

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