Polarization device of CaCO3 grating fabricated by anisotropic wet etching

J. Y. Chang; Y. C. Chang; H. T. Tien; C. C. Sun

doi:10.1109/OMEMS.2002.1031476

Polarization device of CaCO₃ grating fabricated by anisotropic wet etching

J. Y. Chang, Y. C. Chang, H. T. Tien, C. C. Sun

Department of Optics and Photonics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

A polarizer is made in a birefringent crystal, calcite, which is fabricated by anisotropic wet etching. The device is a v-groove grating with a period around 12 μm. The etching patterns are discussed.

Original language	English
Title of host publication	2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	127-128
Number of pages	2
ISBN (Electronic)	0780375955, 9780780375956
DOIs	https://doi.org/10.1109/OMEMS.2002.1031476
State	Published - 2002
Event	IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland Duration: 20 Aug 2002 → 23 Aug 2002

Publication series

Name	2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Conference

Conference	IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
Country/Territory	Switzerland
City	Lugano
Period	20/08/02 → 23/08/02

Access to Document

10.1109/OMEMS.2002.1031476

Cite this

Chang, J. Y., Chang, Y. C., Tien, H. T., & Sun, C. C. (2002). Polarization device of CaCO₃ grating fabricated by anisotropic wet etching. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest (pp. 127-128). Article 1031476 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2002.1031476

Chang, J. Y. ; Chang, Y. C. ; Tien, H. T. et al. / Polarization device of CaCO₃ grating fabricated by anisotropic wet etching. 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc., 2002. pp. 127-128 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest).

@inproceedings{2b4bf60668f24c0e95a599572e846f48,

title = "Polarization device of CaCO3 grating fabricated by anisotropic wet etching",

abstract = "A polarizer is made in a birefringent crystal, calcite, which is fabricated by anisotropic wet etching. The device is a v-groove grating with a period around 12 μm. The etching patterns are discussed.",

author = "Chang, {J. Y.} and Chang, {Y. C.} and Tien, {H. T.} and Sun, {C. C.}",

note = "Publisher Copyright: {\textcopyright} 2002 IEEE.; IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 ; Conference date: 20-08-2002 Through 23-08-2002",

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series = "2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest",

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Chang, JY, Chang, YC, Tien, HT & Sun, CC 2002, Polarization device of CaCO₃ grating fabricated by anisotropic wet etching. in 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest., 1031476, 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest, Institute of Electrical and Electronics Engineers Inc., pp. 127-128, IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002, Lugano, Switzerland, 20/08/02. https://doi.org/10.1109/OMEMS.2002.1031476

Polarization device of CaCO₃ grating fabricated by anisotropic wet etching. / Chang, J. Y.; Chang, Y. C.; Tien, H. T. et al.
2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc., 2002. p. 127-128 1031476 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Polarization device of CaCO3 grating fabricated by anisotropic wet etching

AU - Chang, J. Y.

AU - Chang, Y. C.

AU - Tien, H. T.

AU - Sun, C. C.

PY - 2002

Y1 - 2002

N2 - A polarizer is made in a birefringent crystal, calcite, which is fabricated by anisotropic wet etching. The device is a v-groove grating with a period around 12 μm. The etching patterns are discussed.

AB - A polarizer is made in a birefringent crystal, calcite, which is fabricated by anisotropic wet etching. The device is a v-groove grating with a period around 12 μm. The etching patterns are discussed.

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M3 - 會議論文篇章

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T3 - 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

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BT - 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002

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Chang JY, Chang YC, Tien HT, Sun CC. Polarization device of CaCO₃ grating fabricated by anisotropic wet etching. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc. 2002. p. 127-128. 1031476. (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest). doi: 10.1109/OMEMS.2002.1031476