Polarization beam splitters with autocloned symmetric structure

Sheng Hui Chen, Chun Hung Wang, Kwang Yao Chai, Te Hung Chang, Yu Wen Yeh, Cheng Chung Lee, Shih Liang Ku, Chao Chun Huang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations


We fabricated TiO2/SiO2 2D polarization beam splitters using electron beam gun evaporation with ion-beam-assisted deposition. Symmetric structure designs have been applied to reduce ripples and achieve 200 nm of working range.

Original languageEnglish
Title of host publicationOptical Interference Coatings, OIC 2010
PublisherOptical Society of America (OSA)
ISBN (Print)9781557528919
StatePublished - 2010
EventOptical Interference Coatings, OIC 2010 - Tucson, AZ, United States
Duration: 6 Jun 201011 Jun 2010

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701


ConferenceOptical Interference Coatings, OIC 2010
Country/TerritoryUnited States
CityTucson, AZ


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