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Plasma diagnostics of resonance magnetic field effects on a-Si:H thin films deposition using electron cyclotron resonance plasma
L. C. Hu, Y. W. Lin, C. J. Wang, T. C. Wei, C. R. Yang, C. C. Lee, J. Y. Chang, I. C. Chen, Tomi T. Li
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review