@article{9a56ecfb83184411a0d550d092680654,
title = "Physical analysis of a biomimetic microphone with a central-supported (C-S) circular diaphragm for sound source localization",
abstract = "This paper presents a physical analysis of the biomimetic microphone designed with a central-supported (C-S) diaphragm for the sound source localization. A clover-stem-like C-S design is proposed and achieving 47% improvement of net diaphragm displacement in comparison with the conventional C-S diaphragm design. The new design can effectively not only compensate undesired deformation of sensing diaphragm due to gravity and residual stresses but also make the diaphragm more flexible for better sound pressure sensitivity.",
keywords = "Biomimetic microphone, MEMS microphone, central floating joint, central-supported diaphragm, clover, hybrid, parasitoid fly, quality factor, sound source localization, squeeze film air damping effect",
author = "Chen, {Chien Chang} and Cheng, {Yu Ting}",
note = "Funding Information: Manuscript received April 21, 2011; revised October 03, 2011; accepted October 16, 2011. Date of publication October 28, 2011; date of current version April 13, 2012. This work was supported in part by the NSC of R.O.C. under Grant NSC 100-2220-E-009-007-, and also in part by the Ministry of Education in Taiwan under the ATU Program. The associate editor coordinating the review of this paper and approving it for publication was Prof. Gerald Gerlach. Funding Information: The authors would like to thank Nano Facility Center of National Chiao Tung University and National Chip Implementation Center for the support of the fabrication and measurement instruments and the National Center for High-Performance Computing (NCHC) for the support of CoventorWare simulator.",
year = "2012",
doi = "10.1109/JSEN.2011.2173931",
language = "???core.languages.en_GB???",
volume = "12",
pages = "1504--1512",
journal = "IEEE Sensors Journal",
issn = "1530-437X",
number = "5",
}