Physical analysis of a biomimetic microphone with a central-supported (C-S) circular diaphragm for sound source localization

Chien Chang Chen, Yu Ting Cheng

Research output: Contribution to journalArticlepeer-review

22 Scopus citations

Abstract

This paper presents a physical analysis of the biomimetic microphone designed with a central-supported (C-S) diaphragm for the sound source localization. A clover-stem-like C-S design is proposed and achieving 47% improvement of net diaphragm displacement in comparison with the conventional C-S diaphragm design. The new design can effectively not only compensate undesired deformation of sensing diaphragm due to gravity and residual stresses but also make the diaphragm more flexible for better sound pressure sensitivity.

Original languageEnglish
Article number6062636
Pages (from-to)1504-1512
Number of pages9
JournalIEEE Sensors Journal
Volume12
Issue number5
DOIs
StatePublished - 2012

Keywords

  • Biomimetic microphone
  • central floating joint
  • central-supported diaphragm
  • clover
  • hybrid
  • MEMS microphone
  • parasitoid fly
  • quality factor
  • sound source localization
  • squeeze film air damping effect

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