Performance of a diaphragmed microlens for a packaged microspectrometer

Joe Lo, Shih Jui Chen, Qiyin Fang, Thanassis Papaioannou, Eun Sok Kim, Martin Gundersen, Laura Marcu

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M2 value of the microlens. A tunable calibration source was set up to measure the response of the packaged device. Dual wavelength separation by the packaged device was demonstrated by CCD imaging and beam profiling of the spectroscopic output. We demonstrated specific techniques to measure critical parameters of microoptics systems for future optimization of spectroscopic devices.

Original languageEnglish
Pages (from-to)859-868
Number of pages10
JournalSensors (Switzerland)
Issue number2
StatePublished - Feb 2009


  • Gaussian propagation
  • MEMS
  • Microlens
  • Microoptics
  • Spectroscopy


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