Patterning of metal electrode on flexible substrate using laser transfer method

Kun Tso Chen, Yu Hsuan Lin, Jeng Rong Ho, Sung Ho Liu, Jin Long Liao, Jing Yi Yan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Through incorporating with the technique of rapid polydimethysiloxane (PDMS) lift-off, this study reports on a new laser transfer method that is applicable to printing metallic thin film on a flexible substrate. Aluminum line patterns, with line widths of 40 and 100 um and deposited on poly(ethylene terephthalate) (PET) substrate, are presented. The patterned film is demonstrated to be a good conductor, with resistivity of 2.95×10 -6 Ω-cm, and with very good adhesion strength through the scotch-tape test.

Original languageEnglish
Title of host publicationLasers and Electro-Optics/Quantum Electronics and Laser Science Conference
Subtitle of host publication2010 Laser Science to Photonic Applications, CLEO/QELS 2010
StatePublished - 2010
EventLasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010 - San Jose, CA, United States
Duration: 16 May 201021 May 2010

Publication series

NameLasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010

Conference

ConferenceLasers and Electro-Optics/Quantum Electronics and Laser Science Conference: 2010 Laser Science to Photonic Applications, CLEO/QELS 2010
Country/TerritoryUnited States
CitySan Jose, CA
Period16/05/1021/05/10

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