Overall performance improvement in GaAs MSM photodetectors by using recessed-cathode structure

Rong Heng Yuang, Jia Lin Shieh, Jen Inn Chyi, Jyh Shin Chen

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

We report the experimental work on the GaAs metal-semiconductor-metal photodetectors with recessed cathode and/or anode. The recessed-cathode detectors exhibit much superior dc and speed performance to the conventional one because of the enhancement of hole transport in this structure. Full-width at half-maximum and fall time of the temporal response were measured to be 21 and 13 ps at 5 V bias on a 50 × 50 μm2 detector with a finger width and spacing of 3 μm.

Original languageEnglish
Pages (from-to)226-228
Number of pages3
JournalIEEE Photonics Technology Letters
Volume9
Issue number2
DOIs
StatePublished - Feb 1997

Keywords

  • Hole carriers
  • MSM diodes
  • Optical device fabrication
  • Optoelectronic devices
  • Photodetectors
  • Very-high-frequency devices

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