Fingerprint
Dive into the research topics of 'Optimization on deposition of aluminum nitride by pulsed direct current reactive magnetron sputtering'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Yu Pu Yang, Te Yun Lu, Song Ho Wang, Hsueh Er Chang, Peter J. Wang, Walter Lai, Yiin Kuen Fuh, Tomi T. Li
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review