Optimization on deposition of aluminum nitride by pulsed direct current reactive magnetron sputtering

Yu Pu Yang, Te Yun Lu, Song Ho Wang, Hsueh Er Chang, Peter J. Wang, Walter Lai, Yiin Kuen Fuh, Tomi T. Li

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Engineering & Materials Science

Chemical Compounds