Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors

Keyphrases

• Silicon Microcantilever 100%
• Photonic Crystal Ring Resonator 100%
• Microcantilever Sensor 100%
• Resonator 66%
• Sensing Element 66%
• Nanoring Resonator 66%
• Force Loading 66%
• Nanoelectromechanical Systems 66%
• Fast-growing 33%
• Sensing Mechanism 33%
• Linear Relationship 33%
• Nanometer Scale 33%
• Band Gap Structure 33%
• Position Shift 33%
• Sensing Capability 33%
• Photonic Crystal 33%
• Resonant Wavelength 33%
• Nanocavity 33%
• Wavelength Shift 33%
• Linear Function 33%
• Promising Solutions 33%
• System Application 33%
• Strain Sensor 33%
• Force Sensor 33%
• Biochemical Sensor 33%
• Resonant Wavelength Shift 33%
• Microcantilever 33%
• Layout Configuration 33%
• Nanomechanical Sensing 33%
• Resonator Configurations 33%
• Cavity Resonators 33%

Engineering

• Photonics 100%
• Resonator 100%
• Microcantilevers 100%
• Sensing Element 25%
• Nanoelectromechanical System 25%
• Linear Relationship 12%
• Transducer 12%
• Nanometre 12%
• Sensing Mechanisms 12%
• Linear Function 12%
• Sensing Capability 12%
• Biochemical Sensor 12%
• Band Gap 12%

Material Science

• Silicon 100%
• Resonator 100%
• Photonic Crystal 100%